Professor Metallurgical Engineering & Materials Science
Dean (Intl Relations), IIT Bombay, India
Fellow, Maharashtra Academy of Science,
Field of specialization: Semiconductor thin films and applications in electronic and optoelectronic devices, Photovoltaic devices, Plasma Processing, Nano- surface engineering.
Areas of Expertise: Thin film science & technology, vacuum technology, materials processing and device engineering, plasma enhanced processing, thin film nano-engineering and Nanotechnology
1. Ultra-thin barrier layer on low-k intermetal dielectric (IMDs) by Hot wire CVD –
Dusane R.O., Kumbhar A.A. and Singh S.K.
Patent No. 231216
2. Method of enhancing the reliability of a low-k dielectric layer in the backend processing.Dusane R.O., Kumbhar A.A. and Singh S.K.
Patent No. 223221
3. A Novel Dry Method of Surface Modification of SU-8 for Antibody Immobilization using Hotwire induced pyrolytic process.
Patent No. 213504
S. Mukherjee, R.Lal, V.R.Rao, Dusane R.O. Joshi M and Kale N.S